ULTRAPURE WATER Micro-2013 Proceedings

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This conference proceedings CD contains the PowerPoint presentations, and Papers when available. Titles of the presentations are listed below. The files are in Adobe Acrobat format for easy viewing.

Portland, Oregon, November 12-13, 2013

Moderators: Slava Libman, Ph.D., Balazs NanoAnalysis; Marty Burkhart, Hi Pure Tech, Inc.; and Rich Riley, Intel
Tuesday, November 12

Session 1: Key Business and UPW Technology Trends
8:30 AM- Materials Challenges for Advanced Nodes

Kyle Flanigan, Ph.D., Linx Consulting
9:15 AM- Particle Control Challenges in UPW
Abbas Rastegar, Ph.D., SEMATECH
10:15 AM- SEMI-ITRS Update – 5 (F57)
Slava Libman, Ph.D., Balazs NanoAnalysis; David Blackford, Ph.D., Fluid Measurement Technologies; Dan Wilcox, Spansion; and Marty Burkhart, Hi Pure Tech, Inc.
10:45 AM-Treatment Processes for the Next Decade of UPW.
Philippe Rychen, D. Gensbittel, Rene Sauer, Malek Salamor, Ovivo Switzerland AG
11:15 AM- Inhibition of Copper Corrosion by Removal of H2O2 from UPW Using Noble Metal Catalysis
Daisaku Yano, Masami Murayma, Takashi Futatsuki, and Koji Yamanaka. Organo

Session 2: Innovations with UPW Design and Water Management
1:15 PM- Advanced Removal Technology of Hydrogen Peroxide Using Nanosize Pt Catalyst Resin

Yoichi Miyazaki, Take Fukui, and Hideki Kobayashi, Kurita Water Industries; and Kentaro Yamada, Nippon Sheet Glass Co. Ltd.
1:45 PM- Water and Wastewater Infrastructure Development for a Semiconductor Manufacturing Campus
Ralph Williams and Annabelle Fonseca, CH2M Hill; and Mark Masse, Genesee County Economic Development Center (Batavia, N.Y.)
2:15 PM- Designing a UPW System to Optimize for UPW Unit Costs versus Lowest Capital Costs Will Result in a Long-Term Competitive Advantage for the Life of the Plant
Matthew Weglewski, M&W Group; and John Morgan, H2Morgan
2:45 PM— Direct Measurement of 185-nm Ultraviolet Light for TOC Reduction
Jay Arling, Oliver Lawal, and Dan Shaver, Aquionics Inc.; Bryan Townsend, Black & Veatch
3:45 PM- Direct Osmosis-High Salinity Membrane Cleaning and Restoration: 2013 Update
Hal Stansfield, Ameren Energy Resources; and Dick Youmans and David Paul, David H. Paul, Inc.
4:15 PM-Dynamic UPW Distribution Modeling to Optimize Supply POU Pressure
Matthew Weglewski, M&W Group; and John Morgan, H2Morgan

Wednesday, November 13
Session 3: Advances in UPW Metrology
8:15 AM- TOC Screening with LC-OCD: Current Status
Stefan Huber, Ph.D., DOC-Labor; Slava Libman, Ph.D., Balazs NanoAnalysis
8:45 AM- The Effect of Particle Concentration and Face Velocity on the Removal of Sub-100-nm Particles from Ultrapure Water
Don Grant and Gary Van Schooneveld, CT Associates, Inc.; and Uwe Beuscher, WL Gore and Associates
9:15 AM- Challenges and Results of sub-40-nm Particle Detection in UPW
Michael Thomas, Lighthouse Worldwide Solutions
9:45 AM- Validating the Counting Efficiency of Liquid Optical Particle Counters below 100 nm
Gary Van Schooneveld, Chris Howe, Don Grant, CT Associates; David Blackford, Ph.D., Fluid Measurement Technologies; and Michael Thomas, Lighthouse Worldwide Solutions
10:45 AM- Acoustic Method for Detecting Nano Particles in UPW
Sameer Madanshetty, Ph.D., Uncopiers Inc.
11:15 AM- Extending the Value of Resistivity for Optimizing Microelectronics Water System Performance
David M. Gray, METTLER-TOLEDO Thornton Inc.; and Philippe Rychen, Ovivo Switzerland AG
Session 4: Advanced Materials in UPW Application
1:15 PM- 30 years of PVDF Fluid Handling Systems for High Purity Water Processes
Rosemary Heinze, Arkema Inc.
1:45 PM-Why Are Fluoropolymers the Best Choice for UPW Distribution Systems
Giovanni Biressi, Ph.D., Brigitte Neubauer, Ph.D., and Kris Haggard, Solvay Specialty Polymers
2:15 PM- A Study of the Effect of Elastomeric Seals Exposed to Ozone
Katrin Wallheinke, Wolfgang Paul, and Jeffrey Sixsmith, Georg Fischer Piping Systems; Casey Williamson, SEMTEC, Inc. and Marty Burkhart, Hi Pure Tech, Inc.
2:45 PM- UPW Reclaim, Reuse, and Recycle
Dan Wilcox, Spansion

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